Silicon wafers manufacturing is a technical challenge: corrosive gases must be handled in an ultra clean environment, in order to ensure the silicon etch in submicron accuracy.

It's also an economic challenge: ultra high reliability of all equipment is expected in order to continuously operate the billion dollar fabrication plants.

This is why all world class semiconductor manfucaturing companies allow top priority to the qualification of their major equipment.

TurboMolecular Pumps (TMPs) are considered within this group and must be process qualified.

Thanks to their robust proven design, the oil-free TMPs equipped with S2M Magnetic Bearings and high-speed motors are the world-wide reference.

To date more than 60,000 units are in operation.

A typical turbomolecular vacuum pump bladed rotor weighs less than 5 kg and rotates between 30,000 and 40,000 rpm.

Turbomolecular pumps provide the ultra high vacuum needed for the chip manufacturing.

COMPANY | TECHNOLOGY | PRODUCTS | APPLICATIONS | SERVICE | CONTACT | SITEMAP